A pulse stretcher includes a first prism and a second prism positioned
opposite each other. A first coupling prism is optically coupled to the
first prism with a partially reflective interface that directs a beam
towards the second prism in a helical path. The first prism and the first
coupling prism form a beamsplitter. A recirculating prism (or a
reflective element) reflects the beam from the first prism into the
second prism. Mirrors are positioned around the first and second prisms
to permit recirculation of the beam through the first and second prisms.
The beam recirculates through the first and second prisms using two or
more helical paths. The pulse stretcher can be incorporated into a
lithographic system.