A DMOS device having a trench bus structure thereof is introduced. The
trench bus structure comprises a field oxide layer formed on a P
substrate, and a trench extending from an top surface of the field oxide
layer down to a lower portion of the P substrate. A gate oxide layer and
a polysilicon bus are formed to fill the trench as a main portion of the
bus structure. In addition, an isolation layer and a metal line are
formed atop the polysilicon bus and the field oxide layer. An opening is
formed in the isolation layer to form connections between the polysilicon
bus and the metal line. In specific embodiments, the bus trench and the
gate trenches of the DMOS device are formed simultaneously, and the
polysilicon bus and the gate electrode are formed simultaneously as well.
Therefore, the bus structure is able to form the DMOS transistor without
demanding any lithographic step for defining the position of the
polysilicon bus.