A pressure sensor apparatus is disclosed herein, which generally includes
a sensor element, a flexible sensor diaphragm in intimate contact with
the sensor element at all pressure levels and temperatures, and a package
base and a package cover for hermetically sealing the sensor element and
the flexible sensor diaphragm within a hermetically sealed sensor package
to provide pressure sensor data thereof. The sensor element can be
implemented as a quartz sense element to produce a SAW pressures sensor.
The pressure sensor apparatus can be alternatively based on other sensing
technologies, such as silicon piezoresistive, ceramic capacitive and
others.