A porous film-forming composition comprising (A) a curable silicone resin
having a Mn of at least 100, (B) a micelle-forming surfactant, and (C) a
compound which generates an acid upon pyrolysis remains stable during
storage. The composition is coated and heat treated to form a porous film
which has flatness, uniformity, a low dielectric constant and a high
mechanical strength so that it is best suited as an interlayer dielectric
film in the fabrication of semiconductor devices.