The present invention is directed to methods for patterning a substrate by
imprint lithography. Imprint lithography is a process in which a liquid
is dispensed onto a substrate. A template is brought into contact with
the liquid and the liquid is cured. The cured liquid includes an imprint
of any patterns formed in the template. In one embodiment, the imprint
process is designed to imprint only a portion of the substrate. The
remainder of the substrate is imprinted by moving the template to a
different portion of the template and repeating the imprint lithography
process.