Chemically-amplified positive photoresist compositions are provided that
contain a resin that comprises acetal and alicyclic groups. Photoresists
of the invention can exhibit notably enhanced lithographic properties.
Preferred photoresists of the invention comprise one or more photoacid
generator compounds and one or more phenolic resins comprise one or more
photoacid-labile acetal groups and one or more alicyclic groups such as
adamantyl.