An apparatus and method are disclosed for operating a narrow band short
pulse duration gas discharge laser output light pulse beam producing
system, producing a beam comprising laser output light pulses at a
selected pulse repetition rate, which may comprise: a dispersive center
wavelength selection optic selecting at least one center wavelength for
each pulse determined at least in part by the angle of incidence of the
laser light pulse beam containing the respective pulse on the dispersive
wavelength selection optic; a tuning mechanism operative to select at
least one angle of incidence of a first spatially defined portion of the
laser light pulse beam containing the respective pulse upon the
dispersive center wavelength selection optic; and, the tuning mechanism
comprising a variably refractive optical element defining a plurality of
refractive angular displacements of the first spatially defined portion
of the laser light pulse beam passing through the variably refractive
optical element at one of a plurality of positions of incidence of the
laser light pulse beam on the variably refractive optical element. The
variably refractive optical element may comprise: a first generally flat
face defining a surface of incidence for the laser light pulse beam; and,
a second multifaceted or curved face defining a plurality of generally
flat surfaces of exit or a continuously varying surface of exit for the
laser light beam. Other aspects of pulse parameter metrology and pulse
modulation control, including in response to signals from the utilization
tool are disclosed, e.g., relating to proper dose control with differing
center wavelength spectra.