Dielectric compositions comprised of porous polymeric matrices are
prepared using nitrogen-containing polymers as pore-generating agents.
The compositions are useful in the manufacture of electronic devices such
as integrated circuit devices and integrated circuit packaging devices.
The dielectric compositions are prepared by admixing a polymeric
nitrogenous porogen with a high temperature, thermosetting host polymer
in a suitable solvent, heating the admixture to cure the polymer and
provide a vitrified matrix, and then decomposing the porogen using heat,
radiation, or a chemical reagent effective to degrade the porogen. The
highly porous dielectric materials so prepared have an exceptionally low
dielectric constant on the order of 2.5 or less, preferably less than
about 2.0. Integrated circuit devices and integrated circuit packaging
devices manufactured so as to contain the dielectric material of the
invention are provided as well.