Embodiments in accordance with the present invention encompass
photo-imageable compositions that include polymers of acrylate-type
monomers and norbornene-type monomers. In some embodiments a catalyst
system comprising a cationic or a neutral Pd(II) dimer component having
the formula (Allyl)Pd(P(R.sup.21).sub.3) or (L')[(L)Pd(R)(X)].sub.2,
respectively is employed to effect polymerization. In other embodiments a
free radical or living free radical catalyst is employed to effect
polymerization. At least one of the acrylate-type monomers and
norbornene-type monomers of the polymer embodiments of the present
invention encompass an acid labile moiety. Some polymer embodiments of
the present invention include more than one type of acrylate-type monomer
and norbornene-type monomer. Embodiments of the present invention include
forming a patterned layer on a substrate and some embodiments include
transferring the patterned structure to a material layer first formed on
the substrate.