The present invention provides a method that features improved wetting
characteristics while allowing preferential adhesion and release
characteristics with respect to a substrate and a mold having imprinting
material disposed therebetween. The method includes coating a surface of
the mold with a volume of surfactant containing solution. The surfactant
in the solution includes a hydrophobic component consisting essentially
of a plurality of fluorine-containing molecules. The distribution of the
plurality of the fluorine atoms in the fluorine-containing molecules, as
well as the fluorine-containing molecules throughout the volume provides
a desired contact angle with respect to a polymerizable composition
disposed on the substrate. The contact angle is in a range of 50.degree.
or less.