Controlling stocker capacity in an automated facility and controlling
monitor budgets by capped releases, capped FOUP supplies, and wafer reuse
methodology. A Database is used to order, track, and reclaim test
(monitor) wafers in the FAB. The database automatically controls the
amount of FOUPs in the FAB as well as the amount of wafers released into
the FAB each day. This database also interacts with the Control Center in
helping to release monitor wafers in the FAB.