The present invention is a unified spine structure that EFEM components,
such as a wafer handling robot and a SMIF pod advance assembly, may mount
to. The frame includes multiple vertical struts that are mounted to an
upper support member and a lower support member. Structurally tying the
vertical struts to the support members creates a rigid body to support
the EFEM components. The vertical struts also provide a common reference
that the EFEM components may align with. This eliminates the need for
each EFEM component to align with respect to each other. Thus, if one
EFEM component is removed it will not affect the alignment and
calibration of the remaining secured EFEM components. The unified frame
also creates an isolated storage area for the SMIF pod door and the port
door within the environment that is isolated from the outside ambient
conditions.