The present invention is directed toward a method for reducing pattern
distortions in imprinting layers by reducing gas pockets present in a
layer of viscous liquid deposited on a substrate. To that end, the method
includes varying a transport of the gases disposed proximate to the
viscous liquid. Specifically, the atmosphere proximate to the substrate
wherein a pattern is to be recorded is saturated with gases that are
either highly soluble, highly diffusive, or both with respect to the
viscous liquid being deposited. Additionally, or in lieu of saturating
the atmosphere, the pressure of the atmosphere may be reduced.