Novel compositions comprising photoactive polymers comprising a
dinitrobenzyl group in conjunction with a photoacid generator are
disclosed. In one embodiment, the photoacid generator is a diazide and/or
a sulfonyl aceto carbonyl compound. The photoacid generators are
typically used in amounts of 10 weight percent or less. The compositions
find particular application in storage stable, pH stable, and water
stable positive photoresist compositions. Such compositions demonstrate
reduced process time as compared with similar compositions lacking the
photoacid generator. Methods for using these compositions are also
disclosed.