Structures and methods are provided for an improved multilevel wiring
interconnect in an integrated circuit assembly. The present invention
provides for a multilayer copper wiring structure by electroless,
selectively deposited copper in a streamlined process which further
reduces both intra-level line to line capacitance and the inter-level
capacitance.In particular, an illustrative embodiment of the present
invention includes a novel methodology for forming multilevel wiring
interconnects in an integrated circuit assembly. The method includes
forming a number of multilayer metal lines, e.g. copper lines formed by
selective electroless plating, separated by air gaps above a substrate. A
low dielectric constant material is deposited between the number of metal
lines and the substrate using a directional process. According to the
teachings of the present invention, using a directional process includes
maintaining a number of air gaps in the low dielectric constant material.
Structures and systems are similarly included in the present invention.