A calibration cassette pod for robot teaching and a method of using the
calibration cassette pod are described. In the calibration cassette pod,
a cassette pod body and a cassette pod door are first provided wherein
the cassette pod body is constructed of a top panel, a bottom panel, two
side panels and a front panel to enclose a cavity therein. A first
plurality of ribs is formed on an inside surface of the cassette pod
body, each having a predetermined depth sufficient to support an edge
portion of a wafer. An optical detector housing is mounted on an opening
in the front panel and is adapted for receiving an optical detector
therein. An optical detector that includes a light emission source and a
photo diode receiver for determining the position of the edge portion of
the wafer is mounted in the optical detector housing.