Modular cartridges which may be inserted into and removed from a well or
receptacle on the bottom of a pod. The cartridges may be configured to
include various types and combinations of valves, filters, and/or
conditioning agents. A standalone cartridge replacement station may be
provided for inserting and removing various cartridges from one or more
of the receptacles on the bottom of a pod while wafers are seated within
the pod. The standalone replacement unit may decouple an existing
cartridge from the pod by rotating the cartridge from a locked to an
unlocked position and then lowering the cartridge out of the pod.
Thereafter, the replacement station may insert a new cartridge up into
the appropriate receptacle and rotate the cartridge into a locked
position in the pod.