A photomask assembly and method for protecting the photomask assembly from
contaminants generated during a lithography process are disclosed. A
photomask assembly includes a pellicle assembly formed from a pellicle
frame and a pellicle film coupled to a first surface of the pellicle
frame. The pellicle frame further includes an inner wall and an outer
wall. A photomask is coupled to a second surface of the pellicle frame
opposite the pellicle film. A molecular sieve that prevents airborne
molecular contaminants (AMCs) generated during a lithography process from
contaminating the photomask is associated with the pellicle assembly.