A fluorine gas discharge laser electrode for a gas discharge laser having
a laser gas containing fluorine and a method for manufacturing an
electrode is disclosed. The electrode may include a copper and copper
alloy body having an upper curved region containing a discharge footprint
and a lower portion. In one aspect of an embodiment of the present
invention, the upper region may include copper and the lower region may
include a copper alloy. A portion of the electrode facing a gas discharge
region may be formed in an arcuate shape extending into straight line
portions on either side of the arcuate portion. The straight line
portions may terminate in vertical straight sides.