An improved laser-based wafer carrier mapping sensor is provided. The
sensor includes a number of improvements including laser source
improvements; optical improvements; and detector improvements. Laser
source improvements include the type of laser sources used as well as the
specification of size and power of such sources. Optical improvements
include features that intentionally defocus the laser stripe on the wafer
as well as additional features that help ensure precision stripe
generation. Detector improvements include increasing gain while
decreasing the effects of ambient light. Various combinations of these
features provide additional synergies that facilitate the construction of
a sensor with significantly improved dynamic response while decreasing
the frequency of false cross slot errors.