A method for plasma treating an exposed copper surface and dielectric
insulating layer in a semiconductor device manufacturing process
including providing a semiconductor wafer having a process surface
including an exposed copper portion and an exposed dielectric insulating
layer portion; plasma treating in a first plasma treatment process, the
process surface with a first plasma including ammonia (NH.sub.3) and
nitrogen (N.sub.2) plasma to form a copper nitride layer overlying the
exposed copper portion; and, plasma treating in a second plasma treatment
process the process surface with a second plasma including oxygen
(O.sub.2).