One transport robot transports an FOUP among a load port, a third mounting
section, and a shelf array. The other transport robot, which is disposed
on the reverse side of the one transport robot with the shelf array
interposed between the two, transports an FOUP between the shelf array
and a second mounting section. Executed in the third mounting section are
mapping processing and transportation of a substrate encased in an FOUP
to a substrate processing unit. This enables a plurality of
transportations to be executed at almost the same time. Additionally, the
two transport robots can execute transportation of an FOUP without mutual
spatial interference.