A micro-electro-mechanical (MEMs) mirror device for use in an optical
switch is disclosed. A "piano"-style MEMs device includes an elongated
platform pivotally mounted proximate the middle thereof by a torsional
hinge. The middle portion of the platform and the torsional hinge have a
combined width less than the width of the rest of the platform, whereby
several of these "piano" MEMs devices can be positioned adjacent each
other pivotally mounted about the same axis with only a relatively small
air gap therebetween. In a preferred embodiment of the present invention
specially designed for wavelength switching applications, a greater range
of arcuate motion for a mirror mounted thereon is provided by enabling
the platform to rotate about two perpendicular axes. The MEMs mirror
device according to the preferred embodiment of the present invention
enables the mirror to tilt about two perpendicular axes, by the use of an
"internal" gimbal ring construction, which ensures that a plurality of
adjacent mirror devices have a high fill factor, without having to rely
on complicated and costly manufacturing processes. To limit the amount of
electrical crosstalk between adjacent mirrors, shielding can be
positioned between the electrodes. The shielding can extend upwardly from
the substrate and/or downwardly from the undersurface of the mirrors.
When both types of shielding are provided, one set is offset from the
other to prevent abutment thereof, and to enable an overlapping effect,
which enhances the protection.