A method for fabricating a transducer suitable for a fluidic drive for a
miniature acoustic-fluidic pump or mixer that includes an acoustic
transducer attached to an exterior or interior of a fluidic circuit or
reservoir. The transducer converts radio frequency electrical energy into
an ultrasonic acoustic wave in a fluid that in turn generates directed
fluid motion through the effect of acoustic streaming. The method
includes depositing a piezo-electric thin-film onto a platinum coated
silicon wafer or substrate with capping electrodes, defining each
separate transducer; and dicing said piezoelectric tin-film to provide
individual transducers.