A light oscillation part including an active layer for generating light by
current injection, a tuning layer with an intermediate layer formed
between the active layer and the tuning layer, for varying an oscillation
wavelength by current injection and a diffraction grating formed near the
active layer and the tuning layer, and a light amplification part
including an active layer for amplifying light by current injection are
formed on a semiconductor substrate. Light oscillation elements having
wide wavelength variation ranges and the light amplification are
integrated on a semiconductor substrate, whereby wide wavelength
variation ranges can be obtained and the output light can be much
increased.