A method for fabricating a CMOS image sensor with a prism includes the
steps of: forming a plurality of photodiodes corresponding to respective
unit pixels on a substrate; sequentially forming an inter-layer
insulation layer and an uppermost metal line on the substrate and the
photodiodes; etching the inter-layer insulation layer to form a plurality
of trenches corresponding to the respective photodiodes; depositing a
high density plasma (HDP) oxide layer such that the HDP oxide layer
disposed between the trenches has a tapered profile; depositing a nitride
layer having a higher refractive index than that of the inter-layer
insulation layer to fill the trenches; and depositing an insulation layer
having a lower refractive index than that of the nitride layer to fill
the trenches, thereby forming a prism, wherein the prism induces a total
reflection of lights incident to the photodiodes disposed in edge regions
of a pixel array.