For a device for the detection of substrates stacked at an opening of a
wall element, there existed the problem of constructing the detection
device in such a way that the detection of the position of the substrates
can be performed more flexibly with respect to the course of measurement
and the measuring method employed and a defined approach of a sensor
system to the semiconductor substrate to be detected is ensured in a
definite position of measurement with a lowered risk of particle
generation.A transmitting and receiving device (11) consists of a
vertical drive mechanism (10) mounted on the wall element (1) and a
sensor head (13) that can be adjusted between a lower and an upper
position by means of the vertical drive mechanism (10), said sensor head
being arranged so as to pivot on the vertical drive mechanism (10) in
order to pivot into the opening (4).The device finds application, in
particular, in the semiconductor industry for recording the state of
occupancy of cassettes or containers with substrates, such as
semiconductor wafers, flat-screen displays, or masks.