A dispatch method and system for Long-duration Processing Batch Equipment
(LPBE). The system includes LPBE, a plurality of equipment tools
preceding the LPBE, and a dispatch unit. The LPBE retrieves equipment
candidates having capabilities compatible with those of the LPBE from
among the equipment tools, and selects one candidate. Lots corresponding
to the selected candidate are then retrieved, grouped and sorted to
obtain a plurality of batches, and at least one of the batches is
designated as a reserve batch. Thereafter, the selected candidate
performs a process corresponding to the capability on the reserve batch,
and forwards the processed batch to the LPBE.