The present invention provides a composition for photoresist stripping
solution which shows a superior stripping property of photoresists and
damaged photoresist layers remained after dry etching in the fabrication
process of semiconductor circuit devices, without attacking new wiring
materials and interlayer insulating film materials, as well as a process
of stripping of photoresists and damaged photoresist layers. The
composition for photoresist stripping solution which contains at least
one of acetylene alcohol compounds and organic sulfonic acid compounds,
and at least one of polyvalent alcohols and their derivatives is used.