A method for preparing a transmission electron microscopy (TEM) sample is
provided which includes removing a portion of a substrate using a focused
ion beam tool and securing the removed portion to a support structure to
form a grafted structure. The method further includes forming an opening
within the support structure to expose an underside of the removed
portion and thinning the exposed underside using an ion beam miller tool.
In some cases, the step of securing the removed portion to the support
structure may include placing the substrate specimen upon a film attached
to a mesh grid, positioning the mesh grid upon a framework comprising the
support structure such that the substrate specimen is above the support
structure, and pushing the substrate specimen through the film onto the
support structure. A TEM sample resulting from such methods is also
provided.