The present invention relates to a transporting apparatus and a
transporting control method for thin plates, the apparatus for
transporting the thin plates such as liquid crystal display panels and
glass plates into a processing chamber, comprising a rather large robot
(14) having rotating arms (16) for transporting large-sized thin plates.
The transporting apparatus and a thin plate transporting system can
stably raise the plates up to the heights of approximately 2 m and can
transporting the plates with the deflected amount of the extended
rotating arms (16) compensated. A horizontal support table (13) liftably
cantilevered on two upright support members (12) is provided in the
apparatus, and the transporting robot (14) with the rotating arms (16) is
placed on the horizontal support table (13). Also, the deflected amount
of the extended rotating arms is compensated by raising the height of the
horizontal support table (13) based on the deflected amount. The
deflected amount can also be compensated by varying the installation
angle of the robot (14) placed on the horizontal support table (13).