A method of nanolithography includes transporting a patterning compound
from a nanoscopic tip to a substrate to form a pattern on the substrate.
The patterning compound has a first electrostatic charge and the
substrate has a second electrostatic charge which is opposite to the
first electrostatic charge. The patterning compound can be an
electrically conductive polymer having a charged polymer backbone. The
patterns can be dots and lines having lateral dimensions of less than one
micron. No electrical bias from an external voltage source between the
tip and the substrate is needed.