A method for making an integrated circuit may include forming at least one active optical device and a waveguide coupled thereto. The waveguide may include a superlattice including a plurality of stacked groups of layers. Each group of layers of the superlattice may include a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon. The energy-band modifying layer may include at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.

 
Web www.patentalert.com

< Light modulation apparatus, image pickup apparatus, and drive methods therefor

< Flat panel display device and method of manufacturing the same

> Semiconductor device

> Semiconductor device and manufacturing method therefor

~ 00290