Capacitors for use in an integrated circuit are provided. One aspect of
this disclosure relates to a method of making a capacitor. According to
various embodiments of the method a bottom electrode adapted to act as an
etch stop is formed, a substantially cone-shaped first plate of
conductive material is formed having an interior and exterior surface and
terminating at the bottom electrode, a layer of dielectric material is
formed on at least a portion of the interior and exterior surface of the
first plate and substantially conforming to the shape of the first plate,
and a second plate of conductive material is formed over the layer of
dielectric material. Other aspects and embodiments are provided herein.