An optical system for projection photolithography is disclosed. The
optical system is a modified Dyson system capable of imaging a large
field over both a narrow and a broad spectral range. The optical system
includes a positive lens group having a positive subgroup of elements
that includes at least a plano-convex element and a negative subgroup
that includes at least a negative meniscus element. The lens subgroups
are separated by a small air space. The positive and negative subgroups
constitute a main lens group arranged adjacent to but spaced apart from a
concave mirror along the mirror axis. The system also includes a variable
aperture stop so that the system has a variable NA. A projection
photolithography system that employs the optical system is also
disclosed.