A method of fabricating a polysilicon LCD device includes forming an
active layer on a substrate, forming a first insulating layer having a
first thickness and a second insulating layer having a second thickness
sequentially on the active layer, forming a photoresist on the second
insulating layer, ashing the photoresist, etching first portions of the
first thickness of the first insulating layer corresponding to the source
and drain electrode regions and the reduced second thickness of the
second insulating layer within the first regions to expose source and
drain regions of the active layer corresponding to the source and drain
electrode regions, and etching a second portion of the second thickness
of the second insulating layer to expose a portion of the first
insulating layer corresponding to a gate electrode region, forming a gate
electrode, a source electrode, and a drain electrode simultaneously on
the second insulating layer, forming a passivation layer on the gate
electrode, the source electrode, and the drain electrode, and forming a
pixel electrode on the passivation layer.