Probe cards are configured with protective circuitry suitable for use in
electrical testing of semiconductor dice without damage to the probe
cards. Protective fuses are provided in electrical communication with
conductive traces and probe elements (e.g., probe needles) of a probe
card. The fuses may be active or passive fuses and are preferably
self-resetting, repairable, and/or replaceable. Typically, the fuses will
be interposed in, or located adjacent to, conductive traces residing over
a surface of the probe card. Methods of fabricating a probe card are
provided, as well as various probe card configurations. A semiconductor
die testing system using the probe card is also provided.