A customizable chamber spectral response is described which can be used at
least to tailor chamber performance for wafer heating, wafer cooling,
temperature measurement, and stray light. In one aspect, a system is
described for processing a treatment object having a given emission
spectrum at a treatment object temperature which causes the treatment
object to produce a treatment object radiated energy. The chamber
responds in a first way to the heating arrangement radiated energy and in
a second way to the treatment object radiated energy that is incident
thereon. The chamber may respond in the first way by reflecting the
majority of the heat source radiated energy and in the second way by
absorbing the majority of the treatment object radiated energy. Different
portions of the chamber may be treated with selectively reflectivity
based on design considerations to achieve objectives with respect to a
particular chamber performance parameter.