An optical imprinting apparatus, and a method for producing a
two-dimensional pattern, have line widths less than the wavelength of an
exposure light. The evanescent (proximity) field effect is adopted to
realize the apparatus and method. An optical imprinting apparatus
comprises a container in which light is enclosed, an exposure-mask having
a proximity field exposure pattern firmly fixed to a section of the
container for exposing the exposure pattern on a photo-sensitive material
through an evanescent field by the light enclosed therein; and a light
source for supplying the light in the container.