Strained channel transistors including a PMOS and NMOS device pair to
improve an NMOS device performance without substantially degrading PMOS
device performance and method for forming the same, the method including
providing a semiconductor substrate; forming strained shallow trench
isolation regions in the semiconductor substrate; forming PMOS and NMOS
devices on the semiconductor substrate including doped source and drain
regions; forming a tensile strained contact etching stop layer (CESL)
over the PMOS and NMOS devices; and, forming a tensile strained
dielectric insulating layer over the CESL layer.