An integrated circuit and manufacturing method therefor is provided having
a base with a first dielectric layer formed thereon. A second dielectric
layer is formed over the first dielectric layer. A third dielectric layer
is formed in spaced-apart strips over the second dielectric layer. A
first trench opening is formed through the first and second dielectric
layers between the spaced-apart strips of the third dielectric layer. A
second trench opening is formed contiguously with the first trench
opening through the first dielectric layer between the spaced-apart
strips of the third dielectric layer. Conductor metals in the trench
openings form self-aligned trench interconnects.