Detection electrodes 82D and 82E are formed at positions that include an
antinode of a flexural oscillation mode. The strain of flexural
oscillation reaches a maximum and the effects on the phase difference in
the longitudinal oscillation mode can be cancelled out. The detection
electrodes 82D and 82E are formed at the positions of drive electrodes
82B and 82C used to excite the flexural oscillation mode. A phase
difference in the flexural oscillation mode opposite in sign relative to
the longitudinal oscillation mode is created making it is easy to
classify based on the phase difference between a frequency at which the
longitudinal oscillation mode is dominant and a frequency at which the
flexural oscillation mode is dominant. Thus, reliable control can be
achieved based on the oscillation behaviors at each frequency ensuring a
satisfactory drive force based on oscillation in the longitudinal
oscillation mode.