An integrated photonic device having a vertical optical connection between
vertically oriented waveguides and a process for making the same is
disclosed. A first waveguide is patterned and etched onto an underlying
substrate. A cladding layer is placed over the waveguide and substrate.
The cladding layer is coated with a photoresist, and then patterned with
holes that are slightly offset from the underlying waveguide. The holes
are implanted with nitrogen doses at an angle. The nitrogen doses form an
angled implantation of SiON. The material change and accompanying index
of refraction change due to the angled implantation optically couples the
underlying waveguide with an outside surface of the cladding layer. A
second waveguide or circuit can then be patterned on the outer surface of
the cladding and connected to the angled implantation and underlying
waveguide. Multiple layers of waveguides or circuitry can be connected to
each other in this manner.