In accordance with one embodiment, the present technique provides an X-ray
source. The X-ray source includes a field emitter array having a
plurality of field emitter elements disposed in a vacuum chamber and
configured to emit electrons in the vacuum chamber towards an anode
assembly. The X-ray source also includes an anode disposed in the vacuum
chamber for receiving the electrons emitted by the field emitter array
and configured to thereby generate X-ray radiation. The X-ray source
further includes a source of cleaning gas coupled to the vacuum chamber,
wherein the source of cleaning gas is configured to provide the cleaning
gas to the vacuum chamber towards the field emitter array to reduce
deposition of contaminants on or to clean contaminates from the field
emitter array.