A method of forming a gate electrode is described, comprising forming a
dielectric layer on a substrate, forming a first metal layer having a
first work function on the dielectric layer, forming a second metal layer
having a second work function on the first metal layer, such that a gate
electrode is formed on the dielectric layer which has a work function
that is determined from the work function of the alloy of the two types
of metal. The work function of a microelectronic transistor can be varied
or "tuned" depending on the precise definition and control of the metal
types, layer sequence, individual layer thickness and total number of
layers.