A method of automatically applying optical proximity correction techniques
to a reticle design containing a plurality of features. The method
comprises the steps of: (1) generating a first set of rules for applying
scatter bar assist features to the plurality of features for a given
illumination setting; (2) generating a second set of rules for applying
biasing to the plurality of features for said given illumination setting;
(3) forming a look-up table containing the first set of rules and the
second set of rules; and (4) analyzing each of the plurality of features
with the first set of rules and the second set of rules contained in the
look-up table to determine if either the first set of rules or the second
set of rules is applicable to a given feature. If either the first set of
rules or the second set of rules is applicable to the given feature, the
given feature is modified in accordance with the applicable rule.