A computer implemented method for estimating manufacturing target bias for
products in manufacturing tools. The method first establishes a first
data set according to manufacturing target bias history based on a
correlation with tools used. The manufacturing tools comprise a first
manufacturing tool and other manufacturing tools. Next, a testing
operation is executed for a predicted product in the first manufacturing
tool to obtain a first predicted manufacturing target bias. Finally,
manufacturing target bias of the predicted product in the other
manufacturing tools is calculated according to the first data set and the
first predicted manufacturing target bias.