To accommodate high power densities associated with high-performance
integrated circuits, an integrated circuit (IC) package includes a
heat-dissipating structure in which heat is dissipated from a surface of
one or more dice to a heat spreader. The heat spreader has a
fluid-conducting channel formed therein, and a fluid coolant may be
circulated through the channel via a micropump. In an embodiment, the
channel is located at or near a surface of the heat spreader, and a
heat-generating IC is in thermal contact with the heat spreader. In an
embodiment, the IC is a thinned die that is coupled to the heat spreader
via a thinned thermal interface material. Methods of fabrication, as well
as application of the package to an electronic assembly and to an
electronic system, are also described.