Serious defects on a mask can compromise the functionality of the
integrated circuits formed on the wafer. Nuisance defects, which do not
affect the functionality, waste expensive resources. A defect analysis
tool with job-based automation can accurately and efficiently determine
defect printability. This tool can run a job, using a mask file, to
simulate the wafer exposure that the mask would provide under a given set
of parameters. These parameters can relate to the mask itself, the
inspection system used to create the mask file, and the stepper that can
be used to expose the mask. The processes performed during the job can be
done uniformly for defects on the mask. This uniformity allows the tool
to efficiently run multiple jobs. The results of the job can be presented
using different levels of detail to facilitate user review.