An objective for a microlithography projection system has at least one
fluoride crystal lens. The effects of birefringence, which are
detrimental to the image quality, are reduced if the lens axis of the
crystal lens is oriented substantially perpendicular to the {100}-planes
or {100}-equivalent crystallographic planes of the fluoride crystal. If
two or more fluoride crystal lenses are used, they should have lens axes
oriented in the (100)-, (111)-, or (110)-direction of the
crystallographic structure, and they should be oriented at rotated
positions relative to each other. The birefringence-related effects are
further reduced by using groups of mutually rotated (100)-lenses in
combination with groups of mutually rotated (111)- or (110)-lenses. A
further improvement is also achieved by applying a compensation coating
to at least one optical element of the objective.